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Molecular Nanotechnology via Cavitation - Precise, Clean, Compact and Economical

Mark LeClair*

NanoSpire, Inc.,
Buxton, ME 040931 USA

This is an abstract for a presentation given at the
10th Foresight Conference on Molecular Nanotechnology


Experimental work has lead to the development of a cavitation-based nanofabrication method and workstation prototype to test and validate molecular manufacturing using cavitation microjets. Theory and practice show that laminar cavitation bubbles are well behaved and repeatable. The scientific literature shows that theoretical model predictions of cavitation dynamics compare well to data. Theory and early research results with an electric discharge prototype imply that cavitation nanofabrication is feasible and has high probability of success.

Research results show how cavitation-based molecular manufacturing compares to other nanofabrication technologies. Atomic Force Microscopes (AFM) have a high resolution but are slow. Extreme Ultraviolet Lithography (EUVL) has a resolution of 130 nanometers in production, a laboratory resolution of 70 nm and may reach 30 nm in ten years. Electron beam and ion beam lithography have 20 nm current resolution, but the target must conduct or will clog with charges, deflecting the incoming beam. The cavitation-based nanofabrication method will exceed EUVL, electron beam and ion beam lithography resolution at significantly less cost. Cavitation lithography can deposit or remove far more material per pulse at the same repeat rate as electron beam or ion beam. Cavitation occurs in a liquid and does not require a vacuum to operate, as all the other lithography techniques do.

This cavitation-based molecular manufacturing technology represents an innovative and cost effective approach to nanofabrication, at a projected cost less than a fifth of ion beam or electron beam lithography equipment. Successful pursuit of cavitation nanotechnology will create a 'market driver' enabling new tools, applications, and markets to emerge. The applications for cavitation nanotechnology include: micro/nanofluidics, MEMS/NEMS, MOEMS/NOEMS, biotech, semiconductors, materials science, nanorobotics and laser surgery.

*Corresponding Address:
Mark L. LeClair
NanoSpire, Inc.
25 Jesse Daniel Drive
Buxton, ME 04093 USA
Ph. & FAX: 207.929.6226


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