Bridging Research and Manufacturing: The Role of Surface Science Nanometrology

Surface science metrology is crucial for analyzing and understanding interfaces that impact device performance and reliability. Accurate measurements of surface topography, chemistry, and interfacial properties help improve manufacturing processes and materials design. This presentation highlights how mastering surface and interface science enables scalable and reliable device fabrication from the lab to industrial production. Due to the surface complexity, combining complementary microscopy, spectroscopy, and diffraction techniques is crucial for a thorough analysis. In this talk, I will present examples where combining surface science techniques was essential for investigating and understanding advanced electronic and photonic devices, among others.