As pointed out by BetterHumans.com, the group led by Geoffrey Ozin have produced "Synthetic-Self-Propelled Nanorotors" (Abstract). They also have a number of other interesting nanoscale projects.
While this is still seems to be manufactured with "bulk" scale chemistry perhaps combined with other methods it seems to be approaching the stage (as is the case with the other several examples of human engineered molecular motors) of having a certian amount of "technology" at nanoscales (< 100 nm).
If someone has access to Chemical Communications perhaps they could comment on the exact dimensions of the nanorotors (in nm) and the methods by which they are assembled.