Very Large Scale Integration for MEMS

from the thousands-of-steps-will-get-somewhere dept.
SteveLenhert writes "Integration of basic MEMS components is bridging the gap between micro- and nanotechnology. Very Large Scale Integration (VLSI) of basic electronic components such as diodes and transistors is well established. This article on Mechanical VLSI describes approaches to (and implications of) VLSI of mechanical components such as actuators and cantilevers.